Seven nanometer technology

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Project Title: Seven nanometer technology
Project Number: CORDIS-198669
Project web address: Follow on CORDIS
 
Project Description:
The SeNaTe project is the next in a chain of thematically connected ENIAC JU KET pilot line projects which are associated with 450mm/300mm development for the 12nm and 10nm technology nodes. The main objective is the demonstration of the 7nm IC technology integration in line with the industry needs and the ITRS roadmap on real devices in the Advanced Patterning Center at imec using innovative device architecture and comprising demonstration of a lithographic platform for EUV and immersion technology, advanced process and holistic metrology platforms, new materials and mask infrastructure.A lithography scanner will be developed based on EUV technology to achieve the 7nm module patterning specification. Metrology platforms need to be qualified for N7’s 1D, 2D and 3D geometries with the appropriate precision and accuracy. For the 7nm technology modules a large number of new materials will need to be introduced. The introduction of these new materials brings challenges for all involved processes and the related equipment set. Next to new deposition processes also the interaction of the involved materials with subsequent etch, clean and planarization steps will be studied. Major European stakeholders in EUV mask development will collaboratively work together on a number of key remaining EUV mask issues.The first two years of the project will be dedicated to find the best options for patterning, device performance, and integration. In the last year a full N7 integration with electrical measurements will be performed to enable the validation of the 7nm process options for a High Volume Manufacturing.The SeNaTe project relates to the ECSEL work program topic Process technologies – More Moore. It addresses and targets as set out in the MASP at the discovery of new Semiconductor Process, Equipment and Materials solutions for advanced CMOS processes that enable the nano-structuring of electronic devices with 7nm resolution in high-volume manufacturing and fast prototyping.
 
Project Terms:
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Project Title: Seven nanometer technology
Project Number: CORDIS-198669
Project web address: Follow on CORDIS
Organization: Asml Netherlands B.V., Netherlands, Veldhoven
Collaborators: Physikalisch-Technische Bundesanstalt, DE
Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V., DE
Nederlandse Organisatie Voor Toegepast Natuurwetenschappelijk Onderzoek Tno*, NL
Universiteit Twente, NL
Soitec Sa, FR
Nanomotion Ltd, IL
Heraeus Quarzglas Gmbh & Co Kg, DE
Institut Fuer Mikroelektronik Stuttgart, DE
Fei Electron Optics B.V., NL
Coventor Sarl, FR
Advanced Mask Technology Center Gmbh And Co. Kg, DE
Kla-Tencor Corporation (Israel), IL
Nova Measuring Instruments Ltd, IL
Pfeiffer Vacuum, FR
Interuniversitair Micro-Electronicacentrum Imec Vzw, BE
Lam Research Ag, AT
Aselta Nanographics Sa, FR
Asm Belgium Nv, BE
Asm Europe Bv, NL
Demcon Advanced Mechatronics Bv, NL
Semilab Felvezeto Fizikai Laboratorium Reszvenytarsasag, HU
Recif Technologies, FR
Fabmatics Gmbh, DE
Suss Microtec Photomask Equipment Gmbh & Co. Kg, DE
Ict Integrated Circuit Testing Gmbh, DE
Applied Materials Israel Ltd, IL
Asys Automatic Systems Gmbh & Co. Kg, DE
Bruker Jv Israel Ltd, IL
Intel Electronics Ltd, IL
Entegris Cleaning Process (Ecp) Sas, FR
Fei Czech Republic, S.R.O., CZ
Jenoptik Optical Systems Gmbh, DE
Ri Research Instruments Gmbh, DE
Applied Materials Belgium, BE
Brooks Ccs Gmbh, DE
Kla-Tencor Mie Gmbh, DE
Lam Research Belgium, BE
Carl Zeiss Smt Gmbh, DE
Vdl Enabling Technologies Group Bv, NL
 
Project Categories:
Natural Sciences
 
Other Information:
Fiscal Year: 2015
Project Start Date: 1 April 2015
Project End Date: 31 March 2018
Project program: H2020-EU.2.1.1.7.
 
Project Funding Information:
Funding Mechanism: ECSEL-IA - ECSEL Innovation Action
Year Funding Organization Total Funding, $
2015 European Research Council $199,188,623
Project Title: Seven nanometer technology
Project Number: CORDIS-198669
Project web address: Follow on CORDIS
 
Title FY Funding
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Project Title: Seven nanometer technology
Project Number: CORDIS-198669
Project web address: Follow on CORDIS
 
Project Title Organization FY Funding
Project Title: Seven nanometer technology
Project Number: CORDIS-198669
Project web address: Follow on CORDIS
 
Title Journal Year Country Rel
Project Title: Seven nanometer technology
Project Number: CORDIS-198669
Project web address: Follow on CORDIS
 
Title Year
Project Title: Seven nanometer technology
Project Number: CORDIS-198669
Project web address: Follow on CORDIS
 
Title Phase Year